Design of MEMS-based micro-size instrument for applications of atmospheric environment monitoring and personal exposure measurements

Xuelei Zhang1, Qingqing Tong2, Aijun Xiu2 and Daniel Tong3, (1)Northeast Institute of Geography and Agroecology, Chinese Academy of Sciences, Key Laboratory of Wetland Ecology and Environment, Changchun, China, (2)Key Laboratory of Wetland Ecology and Environment, Northeast Institute of Geography and Agroecology, Chinese Academy of Sciences, Changchun, China, (3)George Mason University Foundation Inc., Columbia, MD, United States
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