Field Evaluation of New Silicon Resonant Sensor Using MEMS Technology for Ocean Bottom Pressure Observation

Masanao Shinohara1, Shin Aoi2, Masashi Mochizuki2, Kenji Uehira3, Tomoaki Yamada4, Takashi Kunugi2, Tetsuya Takeda2, Ryuuichirou Noda5 and Shigeto Iwai5, (1)NIED, ERI, The University of Tokyo, Tsukuba, Japan, (2)NIED, Tsukuba, Japan, (3)NIED, Tsukuba, Ibaraki, Japan, (4)ERI, TheUniversity of Tokyo, Bunkyo-ku, Japan, (5)Yokogawa Elec. Coop., Tokyo, Japan
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