| Preliminary Program subject to change | |||||||||
| 08E10 Reactor Design and Analysis for Electronic Materials | |||||||||
| Overview | Efficient reactor design is key for the optimised manufacturing of electronic materials. In this session we solicit papers describing recent advances in reactor design, optimisation, operation and control for the production of electronic materials, including (but not limited to) techniques such as CVD, etching, CMP, RTP, ALE, etc. Both experimental and computational/modelling papers will be featured. Papers focusing on novel experimental reactor and controller designs and on high-performance computing applications, including multi-scale modelling and modelling of reacting flows and surface kinetics are encouraged. | ||||||||
| Primary Sponsor | Electronics and Photonics (08e) | ||||||||
ChairConstantinos TheodoropoulosSchool of Chemical Engineering and Analytical Science University of Manchester Sackville St Manchester, M60 1QD United Kingdom Phone Number: +44 (0)161 200-4386 Fax Number: +44 (0)161 236-7439 Email: k.theodoropoulos@manchester.ac.uk
CoChairRoger P. PawlowskiSandia National Laboratories P. O. Box 5800 Albuquerque, NM 87185 Email: rppawlo@sandia.gov | |||||||||
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