Recently, we have reported a new approach to form mesoporous silicates involving the infusion and selective condensation of a metal precursor in a hydrophilic domain of a highly-ordered amphiphilic block copolymer dilated with supercritical carbon dioxide. The template can be removed to form mesoporous silica. Using this method, we have successfully replicated spherical and cylindrical morphologies yielding silica films over 1 um thick while maintaining the structure details of the sacrificial block copolymer template. This approach has been used to fabricate silica films with oriented cylindrical channels. Here we extend the SCF approach to titania. Templates were prepared by spin-coating the proper block copolymer with acid catalyst, a blend of poly(ethylene oxide)132-poly(propylene oxide)132-poly(ethylene oxide)132 and poly(4-vinly phenol) (Mw ~ 20,000) for spherical pores or poly(a-methyl styrene-b-vinyl phenol) (Mw ~ 25,000) for perpendicular cylindrical channels, onto a silicon wafer. The block copolymer microphase separates upon drying and the acid catalyst partitions into the hydrophilic domain. The templates were then exposed to a solution of supercritical carbon dioxide and titanium diisopropoxide bis(acetylacetonate) at 130 bar for 60oC resulting in precursor condensation into the hydrophilic domain. The template can be removed by slow calcination. This heat treatment also crystallizes titania. X-ray diffraction (XRD), Raman spectroscopy, atomic force microscopy (AFM), grazing incidence small angle x-ray scattering (GiSAXS), and transmission electron microscopy (TEM) was used to characterize the films. Well-ordered spheres or perpendicular cylinders were apparent in TEM and AFM micrographs, with d-spacings on the order 10-20 nm. XRD showed consistent data for d-spacing as well as the formation of highly crystalline structures upon calcination. GiSAXS shows that the cylindrical domains are oriented perpendicular to the substrate and have a d-spacing of ~20 nm, also consistent with AFM. Spectroscopy shows that the polymer is completely removed after calcination.
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