As the feature size of next-generation microprocessors decreases, the need for low-dielectric constant (low-k) materials with high mechanical strength is an increasing concern. Many potential porous materials take advantage of the low k value of air, which is about 1, but they are often amorphous in nature and thus lack mechanical strength. Porous zeolites, however, are highly crystalline and have a high elastic modulus while retaining the low k values of amorphous porous silica materials.[1] Since water has a high k value, moisture adsorption is a serious concern for all porous low-k materials. Consequently, along with low k and high elastic modulus values, hydrophobicity is becoming an increasingly important parameter.[2],[3] To combat this problem, post-spin-on silylation treatments with chlorotrimethylsilane and hexamethyldisilazane have been performed, and pure-silica zeolite (PSZ) MFI has been functionalized with methyltrimethoxysilane.[4] Here, we report an organic functionalized pure-silica zeolite with an MFI-type structure prepared through a direct-synthesis method by adding a fluorinated silane to the synthesis solution, and the added fluorine functionality increased the hydrophobicity of the zeolite. The zeolite was characterized by x-ray diffraction, 29Si solid-state nuclear magnetic resonance spectroscopy, nitrogen adsorption, FT infrared spectroscopy, and thermogravimetric analysis. Spin-on films from the nanoparticle suspension exhibited higher water contact angles than pure-silica zeolite MFI films, and the zeolite powders had low water content.
[1] Li, Z.J.; Li, S.; Luo, H.M.; Yan, Y. Adv. Funct. Mater. 2004, 14, 1019-1024.
[2] Wang, Z.B.; Mitra, A.P.; Wang, H.T.; Huang, L.M.;Yan, Y.S. Adv. Mater. 2001, 13, 1463-1466.
[3] Li, Z.J.; Lew, C.M.; Li, S.; Medina, D.I.; Yan, Y. J. Phys. Chem. B 2005, 109, 8652-8658.
[4] Li, S.; Li, Z.J.; Medina, D.; Lew, C.; Yan, Y. Chem. Mater. 2005, 17, 1851-1854.
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