On State Estimation in the Low-Volume High-MIX Semiconductor Manufacturing Using a Singular Gauss-Markov Model
Jin Wang, Department of Chemical Engineering, Auburn University, Auburn, AL 36849 and Qinghua (Peter) He, Department of Chemical Engineering, Tuskegee University, Tuskegee, AL 36088 |
Modeling and Control of the Gradient Freeze Method of Crystal Growth
Lisa Lun, Andrew Yeckel, Prodromos Daoutidis and Jeffrey J. Derby, Chemical Engineering and Materials Science, University of Minnesota, 151 Amundson Hall, Minneapolis, MN 55455 |
Combining a Legacy Cfd Code with an Evolutionary Algorithm to Perform Optimization Analysis of Chemical Vapor Deposition Systems
Theodora C. Xenidou, Andreas G. Boudouvis and Nicolas C. Markatos, School of Chemical Engineering, National Technical University of Athens (NTUA), GR-15780, Athens, Greece |
System Identification and Model Predictive Control of Microstructure during Thin-Film Growth
Amit Varshney, Pennsylvania State University, 23 Fenske Laboratory, Pennsylvania State University, University Park, PA 16802 and Antonios Armaou, The Pennsylvania State University, University Park, PA 16802 |
Building Non-Parametric Models for Rsm: a Bayesian Approach and Its Application to Plasma Etching
Nirmal Tatavalli Mittadar, University of Houston, 8181 Fannin Apt#2628, Houston, TX 77054, Michael Nikolaou, Chemical Engineering, University of Houston, 4800 Calhoun Road, Houston, TX 77204-4004 and Demetre J. Economou, University of Houston, 4800 Calhoun Rd. Chem. Eng. Dept. S239, Houston, TX 77204 |
Effects of Temperature and Structural Defects on the Theoretical Strength of
Hadrian Djohari, Department of Chemical Engineering, University of Massachusetts, Amherst, 214 Goessmann Laboratory, Amherst, MA 01003, Frederick Milstein, University of California, Santa Barbara, Department of Mechanical & Environmental Engineering and Materials Department, Santa Barbara, CA 93106 and Dimitrios Maroudas, University of Massachusetts, Department of Chemical Engineering, Amherst, MA 01003 |
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