Wednesday, November 7, 2007 - 1:10 PM
446c

Ab-Initio Study on Zinc Sulfide Formation Mechanism in A Cvd Reactor

Yousef Sharifi, Chemical, Materials, and Biomolecular Engineering, University of Connecticut, 191 Auditorium Rd Unit 3222, Room 204, Storrs, CT 06268 and Luke E. K. Achenie, Department of Chemical Engineering, Virginia Polytechnic Institute and State University, Randolph Hall 133, Blacksburg, VA 24061.

Zinc sulfide has a large band gap and is widely used in optical devices, laser domes, and reflective windows. Chemical vapor deposition (CVD) is the method of choice for producing zinc sulfide from zinc vapor and hydrogen sulfide on a large scale. Here, high quality, crystallinity, and low cost are desired. As such the ability to control the CVD reaction is very important and requires the CVD reaction mechanism which is not well known. In the present work, the reaction between zinc vapor and hydrogen sulfide in a CVD reactor has been studied using ab initio and density functional calculations. Geometry optimizations were performed at B3LYP/6-31G (d) and B3LYP/6-311G (d, p) for reactants, transition structures, intermediate complexes, and products. Enthalpy and free energy of the reaction were estimated using B3LYP/6-31G (d), B3LYP/6-311G (d, p), Gaussian G1, Gaussian G2, and G2MP2. The rate constant in the gas phase reaction was calculated using the Transition State Theory (TST) and was subsequently used in a Computational Fluid Dynamics (CFD) model that accounts for momentum, mass, and energy balance among others. In this presentation, two different pathways have been proposed for this reaction, namely a pathway that involves one transition state, and a second pathway involving two intermediate complexes and two transition states. The calculated rate constants using the proposed pathways were employed in a simulation of the deposition process. The calculated deposition rate is in excellent agreement with experimental data for the same reactor configuration. This suggests that molecular modeling is a powerful surrogate for experiments.