Plasma-Surface Interactions and the Control of Nanostructure

Low temperature, nonequilibrium ionized gas plasmas are powerful tools for creating nanostructures on surfaces, especially over large areas. However, plasma-surface interactions are notoriously complex with many species interacting synergistically over disparate length and time scales. In this talk, I will review some of the opportunities and challenges in creating and controlling surface nanostructures with plasmas, with a focus on selected topics including nano-scale features in plasma etch and the challenges of using organic polymer masks for etching.