Nanostructured Coatings by Combined Flame Spray Synthesis of Nanoparticles and Cluster Beam Deposition

A novel one-step deposition method for nanostructured coatings combining gas-phase flame synthesis of nanoparticles and supersonic cluster beam deposition is presented. Metal-oxide and noble metal nanoparticles are first produced by high temperature flame spray pyrolysis. The combustion aerosol is then expanded through a critical flow nozzle into the first vacuum chamber of the deposition unit. Thereby, the aerosol is rapidly quenched freezing nanoparticle growth. A series of aerodynamic lenses in the vacuum deposition apparatus filters out large particles and focuses the remaining aerosol into a beam. The particle beam is then directed at a substrate generating porous nanoparticulate films, for application in catalysis, gas sensing, or biotechnology.