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Topics in Plasma Science and Thin Film Applications III - in Honor of Herbert H. Sawin

Monday, November 17, 2008: 3:15 PM
Franklin 8 (Marriott Philadelphia Downtown)

Description:
Topics In Plasma Science and Thin Film Applications III - In Honor of Herbert H. Sawin


Sponsor:
Electronics and Photonics


Chair:
Jane P. Chang
Email: jpchang@seas.ucla.edu

CoChair:
Sumit Agarwal
Email: sagarwal@mines.edu


3:15 PM
(183a) Plasma Etching for Metal Gate Electrode Fabrication in Conventional and Sub-Threshold Transistor Integration
Steven A. Vitale, Jakub Kedzierski, Nisha Checka and Craig L. Keast

3:45 PM
(183b) Interface Preparation for High Mobility Substrates
Anthony J. Muscat

4:15 PM
(183c) Applying Lessons Learned from An Etching Lab: The Role of O Atoms In PECVD
Colin A. Wolden

4:45 PM
(183d) Polymer Nano-Texturing and Stochastic Nano-Patterning Using Plasma Processing
Evangelos Gogolides, Angeliki Tserepi, Nikos Vourdas, Maria Elena Vlachopoulou, Katerina Tsougeni and Dimitrios Kontziampasis

5:15 PM
(183e) CMP Pad Surface Analysis and the Components of Pad Surface Texture
Andrew S. Lawing
See more of this Group/Topical: Materials Engineering and Sciences Division
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