Session: Plasma Science and Processing (2009 Annual Meeting)

Description:

This session focuses on plasma science and processing topics, including gas-phase diagnostics, plasma-surface interactions, and multiscale modeling.

Sponsor:

Electronics and Photonics

Chair:

Sang M. Han
Associate Professor
University of New Mexico
Department of Chemical & Nuclear Engineering
Albuquerque, NM 87131-1341
Phone Number: 505-277-3118
Fax Number: 505-277-5433
Email: meister@unm.edu

Co-Chair:

Cheng-che (Jerry) Hsu

Papers:

378a

Mechanism for Surface Activation of Aromatic Polymers with Atmospheric Pressure Plasmas
Eleazar Gonzalez II, University of California, Los Angeles; Michael Barankin, University of California, Los Angeles; Peter C. Guschl, Surfx Technologies; Robert F. Hicks, University of California, Los Angeles

378b

Sterilization of Surfaces with a Handheld Atmospheric Pressure Plasma
Sara B. Habib, University of California, Los Angeles; Eleazar Gonzalez II, University of California, Los Angeles; A. Tijerina, CMI; Mark Sloan, CMI; R. F. Hicks, University of California, Los Angeles

378c

Plasma-Assisted Atomic Layer Deposition of Titanium Dioxide: Reaction Mechanism Studies Using Attenuated Total Reflection Fourier Transform Infrared Spectroscopy
Vikrant R. Rai, Colorado School of Mines; Sumit Agarwal, Colorado School of Mines

378d

Diagnostic Study of An Arc Plasma Jet Under Atmospheric Pressure and Its Applications to Materials Processing
Cheng-che (Jerry) Hsu, National Taiwan University; Chengyi Wu, National Taiwan University; Yaowen Hsu, National Taiwan University; Yaojhen Yang, National Taiwan University

378e

First-Principles-Based Kinetic Modeling of Surface Growth During Plasma Deposition of Silicon Thin Films
Sumeet C. Pandey, University of Massachusetts; Tejinder Singh, University of Massachusetts; Dimitrios Maroudas, University of Massachusetts

378f

Feature Profile Evolution: From Plasma Etching and Deposition to Surface Roughness Propagation
John Hoang, UCLA; Jane P. Chang, University of California at Los Angeles

See more of this Group/Topical: Materials Engineering and Sciences Division

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