Session: Semiconductor Surface Chemistry (2009 Annual Meeting)

Description:

This session will focus on the characterization, analysis, modeling, and utilization of semiconducting surfaces.

Sponsor:

Low Pressure

Co-Sponsor(s):

Electronics and Photonics (08e)

Chair:

Katherine S. Ziemer
Northeastern University
Chemical Engineering
342 Snell Engineering
Boston, MA 02115
Phone Number: 6173732990
Fax Number: 6173732209
Email: k.ziemer@neu.edu

Co-Chair:

Edmund Seebauer

Papers:

168a

Particle Adhesion in Microelectronics Processing
Caitlin Kilroy, Purdue University; Stephen P. Beaudoin, Purdue University

168b

RHEED-TRAXS Development for Real Time, in-Situ Stoichiometry Analysis During Thin Film Deposition
Bing Sun, Northeastern University; Zhuhua Cai, Northeastern University; Martina List, Northeastern University; Katherine S. Ziemer, Northeastern University

168c

Defect Engineering for Ultra-Shallow Junctions Using Solid-Solid Interfaces
Prashun Gorai, University of Illinois, Urbana-Champaign; Yevgeniy Kondratenko, University of Illinois, Urbana-Champaign; Edmund Seebauer, University of Illinois, Urbana-Champaign

168d

Chemical Mechanisms of Interface Degradation Between Barium Hexaferrite Thin Films On Wide Bandgap 6H-SiC
Zhuhua Cai, Northeastern University; Trevor L. Goodrich, Northeastern University; Zhaohui Chen, Northeastern University; Bing Sun, Northeastern University; Vince Harris, Northeastern University; Katherine S. Ziemer, Northeastern University

See more of this Group/Topical: Engineering Sciences and Fundamentals

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