809 Gas Phase Deposition Processes
809 Gas Phase Deposition Processes
Friday, November 8, 2013: 12:30 PM
Franciscan D (Hilton)
Description:
Gas phase deposition includes a wide variety of thin film growth technologies, including physical vapor deposition (PVD), chemical vapor deposition (CVD), atomic layer deposition (ALD), and molecular beam epitaxy (MBE), as well as several other methods included within these broad topics. This session welcomes both experimental as well as theoretical contributions in this area.
Sponsor:
Electronics and Photonics
Chair:
Co-Chair:
- indicates paper has an Extended Abstract file available on CD.
See more of this Group/Topical: Materials Engineering and Sciences Division

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