473010 Process Control for Atmospheric Pressure Plasma Systems
473010 Process Control for Atmospheric Pressure Plasma Systems
Sunday, November 13, 2016: 4:02 PM
Golden Gate 5 (Hilton San Francisco Union Square)
Atmospheric pressure plasma systems show significant promise in materials processing and medical applications, but challenges remain in device instrumentation and characterization, real-time process control, and dosage quantification. We discuss the design and implementation of a fully-automated atmospheric pressure plasma testbed for rapidly screening device designs and evaluating thermal, electrical, optical, and chemical instrumentation schemes and process control strategies.
See more of this Session: Plasma and Electrochemical Deposition Techniques
See more of this Group/Topical: Materials Engineering and Sciences Division
See more of this Group/Topical: Materials Engineering and Sciences Division

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