526686 Multiscale CFD Model Parallelization with Application to PECVD of Thin Films

Marquis Crose1, Anh Tran1, Yangyao Ding1 and Panagiotis D. Christofides2, (1)Department of Chemical and Biomolecular Engineering, University of California, Los Angeles, Los Angeles, CA, (2)Department of Chemical and Biomolecular Engineering and Department of Electrical Engineering, University of California, Los Angeles, Los Angeles, CA