528346 Product Uniformity in PECVD Systems: Applying Run-to-Run Control to a Multiscale Three-Dimensional CFD Model

Marquis Crose1, Anh Tran1, Yangyao Ding1, Panagiotis D. Christofides2 and Weiqi Zhang3, (1)Department of Chemical and Biomolecular Engineering, University of California, Los Angeles, Los Angeles, CA, (2)Department of Chemical and Biomolecular Engineering and Department of Electrical Engineering, University of California, Los Angeles, Los Angeles, CA, (3)Chemical Engineering, UCLA, Los Angeles, CA
See more of this Session: Dynamics, Reduction, and Control of Distributed Parameter Systems
See more of this Group/Topical: Computing and Systems Technology Division