530726 Electrochemical Atomic Layer Deposition and Etching of Metals for Applications in Semiconductor Nano-Manufacturing

Kailash Venkatraman, Yukun Gong and Rohan Akolkar, Department of Chemical and Biomolecular Engineering, Case Western Reserve University, Cleveland, OH
See more of this Session: Electrochemical Engineering: Industry-Relevant Problems and Solutions
See more of this Group/Topical: Engineering Sciences and Fundamentals