Abstract: Investigation of Electrical and Optical Properties of Indium Oxide Thin-Films Prepared By Atomic Layer Deposition Using Trimethylindium and Ozone Precursors (2018 AIChE Annual Meeting)

534180 Investigation of Electrical and Optical Properties of Indium Oxide Thin-Films Prepared By Atomic Layer Deposition Using Trimethylindium and Ozone Precursors

Hossein Salami¹, Alan Uy¹, Vivek Dwivedi² and Raymond A. Adomaitis¹, (1)Chemical & Biomolecular Engineering, Institute for Systems Research, University of Maryland, College Park, MD, (2)NASA-GSFC, Greenbelt, MD

See more of this Session: Nanostructured Thin Films
See more of this Group/Topical: Materials Engineering and Sciences Division