534856
Spatial Atomic Layer Deposition By "Air Hockey" Design for Dielectric Multilayer Optical Films
John A. Grasso, Chemical And Biomolecular Engineering, University of Connecticut, Storrs, CT, Nicholas Oliveira, Department of Chemical and Biomolecular Engineering, University of Connecticut, Storrs, CT and Brian G. Willis, Chemical and Biomolecular Engineering, University of Connecticut, Storrs, CT
