535168 Group Contribution Method for Atomic Layer Deposition Based on Adsorbate Solid Solution Theory for Computer Aided Design of Novel Materials and Nanostructures

Mina Shahmohammadi, Chemical Engineering, University of Illinois at Chicago, Chicago, IL, Rajib Mukherjee, VRI-CUSTOM, Crystal Lake, IL, Christos G. Takoudis, University of Illinois at Chicago, Chicago, IL and Urmila M. Diwekar, Vishwamitra Research Institute, Clarendon Hills, IL
See more of this Session: Nanostructured Thin Films
See more of this Group/Topical: Materials Engineering and Sciences Division