535168
Group Contribution Method for Atomic Layer Deposition Based on Adsorbate Solid Solution Theory for Computer Aided Design of Novel Materials and Nanostructures
Mina Shahmohammadi, Chemical Engineering, University of Illinois at Chicago, Chicago, IL, Rajib Mukherjee, VRI-CUSTOM, Crystal Lake, IL, Christos G. Takoudis, University of Illinois at Chicago, Chicago, IL and Urmila M. Diwekar, Vishwamitra Research Institute, Clarendon Hills, IL