Abstract: Evaluation of Three-Dimensional Line-Edge Roughness of Pre-and Post-Dry Etched Line and Space Patterns of Block-Copolymer Lithography (2018 AIChE Annual Meeting)

538609 Evaluation of Three-Dimensional Line-Edge Roughness of Pre-and Post-Dry Etched Line and Space Patterns of Block-Copolymer Lithography

Shubham Pinge¹, Durairaj Baskaran² and Yong Lak Joo¹, (1)Robert Frederick Smith School of Chemical and Biomolecular Engineering, Cornell University, Ithaca, NY, (2)R&D Center, EMD Performance Materials Corp., Somerville, NJ

See more of this Session: Nanostructured Polymers and Composites
See more of this Group/Topical: Materials Engineering and Sciences Division