High quality Bi₂Sr₂Ca_nCu_n+1O_x superconducting thin films fabricated by using the evaporation method at various substrate temperatures, T_sub, and ozone gas pressures, pO₃. The correlation diagrams of the Bi₂Sr₂Ca_nCu_n+1O_x phases with T_sub and pO₃ are established in the 2212 and 2223 compositional films.

  In spite of 2212 compositional sputtering, Bi2201 and Bi2223 as well as Bi2212 phases come out as stable phases depending on T_sub and pO₃. From these results, the thermodynamic evaluation of ΔH and ΔS, which are related with Gibbs' free energy change for single Bi2212 or Bi2223 phase, was performed.