| Preliminary Program subject to change | ||||||
| 08E08 Particles in Semiconductor Processing | ||||||
| Overview | Particles, and especially nanoparticles, play many roles in the processing of semiconductors for electronic and photonic applications. Unintentionally generated particles are sources of contamination and yield loss in conventional processing. Slurries for chemical mechanical polishing (CMP) contain abrasive nanoparticles of a variety of materials. Semiconductor nanoparticles or 'quantum dots' are envisioned by many as active components of future electronic and photonic devices. This session is intended to include studies of particle formation, or or the prevention thereof, and particle behavior in any or all of these roles. Both experimental and theoretical or modeling studies are welcome. | |||||
| Primary Sponsor | Electronics and Photonics (08e) | |||||
ChairStephen P. BeaudoinAssociate Professor Purdue University School of Chemical Engineering - Forney Hall of Chemical Engineering 480 Stadium Mall Drive West Lafayette, IN 47907-2100 Phone Number: 765-494-7944 Fax Number: 765-494-0805 Email: sbeaudoi@purdue.edu
CoChairMark SwihartAssociate Professor Chemical and Biological Engineering and Institute for Lasers, Photonics, and Biophotonics University at Buffalo (SUNY) 303 Furnas Hall Buffalo, NY 14260 Phone Number: 716-645-2911 x2205 Fax Number: 716-645-3822 Email: swihart@eng.buffalo.edu | ||||||
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