Session: Topics in Plasma Science and Thin Film Applications I - in Honor of Herbert H. Sawin (2008 Annual Meeting)

Topics in Plasma Science and Thin Film Applications I - in Honor of Herbert H. Sawin

Monday, November 17, 2008: 8:30 AM

Franklin 8 (Marriott Philadelphia Downtown)

Description:

Topics in Plasma Science and Thin Film Applications I - In Honor of Herbert H. Sawin

Sponsor:

Electronics and Photonics

Chair:

Jane P. Chang
Email: jpchang@seas.ucla.edu

CoChair:

Sumit Agarwal
Email: sagarwal@mines.edu

8:30 AM

(56a) Past and Future of Modeling and Simulation for Plasma Processing
Demetre J. Economou

9:05 AM

(56b) Atomistic Simulations of Feature Scale Etch Profile Evolution
David B. Graves and Joseph J. Vegh

9:40 AM

(56c) Overcoming Patterning Challenges at the 32 Nm Nodes
Arpan Mahorowala

10:10 AM

(56d) From the Sawin Lab to NASA: Uses of Very Long Vacuum Tubes
Brett A. Cruden

10:40 AM

(56e) Highlights on Plasma-Surface Interactions – Honoring the Distinguished Career of Herbert H. Sawin
Jane P. Chang

See more of this Group/Topical: Materials Engineering and Sciences Division

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